Presentation Information
[8a-A13-3]Transparent Conductive Anatase Nb-Doped TiO2 Obtained via Annealing in Ambient Air
〇Ryota Shimizu1, Yumie Miura2, Tomohito Sudare2, Shigeru Kobayashi2, Shoichiro Nakao2, Tetsuya Hasegawa2, Naoomi Yamada3, Taro Hitosugi2 (1.IMS, 2.Univ. Tokyo, 3.Chubu Univ.)
Keywords:
Transparent conducting oxides,Titanium dioxide,Widegap semiconductors
Transparent conductive Nb-doped TiO2 thin films were realized by ambient-air annealing using precursor films deposited without intentional substrate heating under low oxygen partial pressure by RF magnetron sputtering. A sharp decrease in electrical resistance was observed at approximately 350°C, corresponding to the crystallization from the amorphous phase to the anatase phase. The resulting films exhibited both high visible-light internal transmittance exceeding 90% and a low room-temperature resistivity of 1.2×10-3 Ω·cm. These results demonstrate the feasibility of a practical fabrication process for TNO transparent conducting films based on ambient-air heat treatment.