[8a-B31-1~11] 12.1 Fabrications and Structure Controls

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[8a-B31-2] Thermal Stability and Defect Formation of Au Films on Organic Adhesion Monolayers

〇Yoshiaki Hattori¹, Yih-Ren Chang¹, Masatoshi Kitamura¹ (1.Kobe Univ.)

Keywords:

organic monolayer

A multilayer substrate consisting of a thin Au film on a thermally oxidized Si substrate is effective for observing ultrathin films with thicknesses on the order of 1 nm using a conventional optical microscope. However, Cr adhesion layers, which are commonly used for Au film deposition, present challenges in terms of thermal stability and optical design. The authors previously demonstrated that an organic monolayer derived from 3-mercaptopropyltrimethoxysilane (MPTMS) can serve as an adhesion layer, achieving thermal stability above 250 °C while maintaining the optical properties of the substrate. Previous studies revealed that polygonal holes form in the Au film during heating, although the underlying mechanism remains unclear. In this study, the thermal stability and defect formation behavior of Au films deposited on MPTMS were investigated.