[8a-B31-1~11] 12.1 Fabrications and Structure Controls

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-B31-7] Study of Indium Oxide Thin Films Fabricated via Solution Processing and Vacuum Ultraviolet Irradiation

〇(M1)Hikari Tanaka¹, Ayumu Nagaoka², Luyang Song^1,3, Yoshiyuki Suzuri^1,3 (1.Grad. Sch. Sci. Eng., Yamagata Univ., 2.Grad. Sch. Org. Mater., Yamagata Univ., 3.INOEL, Yamagata Univ.)

Keywords:

Indium Oxide,solution process,vacuum UV

While indium oxide-based materials, which possess high transmittance and excellent electrical properties, are primarily deposited using vacuum processes, there is a challenge in that sufficient electrical properties cannot be obtained using low-temperature and solution process. Therefore, in this study, we conducted a fundamental investigation of the photodensification reaction induced by vacuum ultraviolet (VUV) light irradiation on indium oxide precursors prepared by solution process. As a result, a decrease in film thickness and an increase in the average refractive index were observed following VUV irradiation, confirming that the VUV reaction was proceeding.