Presentation Information
[8a-E201-11]Development of Direct Sputter Deposition Technology for SnO2 Electron Transport Layers on Perovskite Layers
〇Michihiro Tokunaga1, Takahito Nishimura1 (1.Science Tokyo)
Keywords:
perovskite solar cell,sputtering,electron transport layer
To enhance the stability of inverted perovskite solar cells, we investigated the direct sputter deposition of an inorganic SnO2 electron transport layer (ETL). To evaluate the issue of interfacial damage, we examined the impact on device performance by varying the plasma power and the target-substrate (TS) distance. Through optimization, a maximum PCE of 11.8% was achieved. At the conference, we will discuss the device operation principles in detail based on various physical properties and interfacial characteristics of the SnO2 films.
