Presentation Information
[8a-PA1-16]Introduction of Computer-Generated Hologram Experiment Using Photolithography
〇Mari Kasashima1, Hitoe Habuchi1, Eiji Shiraki1 (1.Gifu Kosen)
Keywords:
semiconductor education,computer generated hologram,maskless lithography
As part of human resource development for the semiconductor industry, this study investigates the introduction of computer-generated hologram (CGH) experiments using photolithography in the advanced course at Gifu Kosen. This report outlines the experimental details and implementation plan, focusing on the design based on the inverse Fourier transform and the fabrication process using photolithography.