[8a-PA1-1~31] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[8a-PA1-26] Integrated Circuits Made Manually under Non-Cleanroom Conditions

〇(B)Sora Mayumi¹, Kaito Narita¹, Rukiya Noguchi¹, Takuto Tsuji¹ (1.NIT, Suzuka College)

Keywords:

Integrated Circuits

Integrated circuits consisting of ring oscillators with multi-stage E/E-type MOS inverters were fabricated under non-cleanroom conditions utilizing previously established semiconductor processes, including n-type impurity diffusion layer formation via phosphosilicate glass. As a result, it was indicated that oscillating outputs from the fabricated devices were successfully observed.