Presentation Information
[8a-PA1-26]Integrated Circuits Made Manually under Non-Cleanroom Conditions
〇(B)Sora Mayumi1, Kaito Narita1, Rukiya Noguchi1, Takuto Tsuji1 (1.NIT, Suzuka College)
Keywords:
Integrated Circuits
Integrated circuits consisting of ring oscillators with multi-stage E/E-type MOS inverters were fabricated under non-cleanroom conditions utilizing previously established semiconductor processes, including n-type impurity diffusion layer formation via phosphosilicate glass. As a result, it was indicated that oscillating outputs from the fabricated devices were successfully observed.