[8a-PA3-1~13] 7 Beam Technology and Nanofabrication (Poster)

[8a-PA3-13] Effect of Noble Gas Mixing on the production of Carbon Molecular Ion Beam

〇(M2)Kozaburo Ito¹, Yuto Imai¹, Toshiro Kasuya¹, Naoki Miyamoto¹, Motoi Wada¹, Harunori Yoshikawa¹ (1.Doshisha Univ.)

Keywords:

ion source,carbon molecular ions,noble gas