[8a-PA3-1~13] 7 Beam Technology and Nanofabrication (Poster) | The 87th JSAP Autumn Meeting 2026

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Poster presentation7 Beam Technology and Nanofabrication : 7 Beam Technology and Nanofabrication (Poster)

[8a-PA3-1~13]7 Beam Technology and Nanofabrication (Poster)

Tue. Sep 8, 2026 11:00 AM - 12:30 PM JST
Tue. Sep 8, 2026 2:00 AM - 3:30 AM UTC

PA3 (1st Gymnasium)

[8a-PA3-1]Field Emission from Ga₂O₃ Microparticles Attached to a Si Substrate via Ag Nanoparticle Ink

〇(M2)Tomohiro Takei¹, Tomomi Yoshimoto^1,2 (1.Toyo Univ., 2.Toyo Univ. BNERC)

[8a-PA3-2]Energy Spread Evaluation of a Thermionic Electron Gun for SEM-EELS

〇Yuto Tajiri¹, Sotatsu Yanagimoto¹, Takumi Sannomiya¹ (1.Science Tokyo)

[8a-PA3-3]Wet Etching Characteristics of MoN Thin Films in HNO₃ Etchant

〇(M1)Yuichiro Deguchi¹, Yuta Fujisawa¹, Ryohei Sibata¹, Mitunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

[8a-PA3-4]An Exposure Apparatus for Projecting Aberration-Correcting Patterns onto Curved Multilayer Mirror Substrates

〇(B)Sera Sakamoto¹, Lucas Prevotel², Eirini Papagiannouli², Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ., 2.Institut d'Optique.)

[8a-PA3-5]Development of rapid fluorescence mode XAFS measurement system with mxdCMOS detector

〇Tomoya Uruga^1,2, Takuma Kaneko^1,2, Togo Kudo², Kazuo Kobayashi², Toshiaki Tosue³, Hideto Imai^1,4, Yoshiharu Uchimoto¹, Takaki Hatsui³ (1.Kyoto Univ., 2.JASRI, 3.RIKEN, 4.FC-Cubic)

[8a-PA3-6]Development of element-specific electronic state measurement and analysis techniques for 5d transition metal materials by resonant hard X-ray photoelectron spectroscopy

〇Akira Yasui¹, Takeshi Kotokawa², Eiji Ikenaga³ (1.JASRI, 2.Nagoya Univ., 3.PhoSIC)

[8a-PA3-7]Segmentation of X-ray CT Images Using Integrated Features from Absorption and Phase-Contrast Images

〇Ryosuke Ueda¹, Yuki Goto², Hideki Tsuruta², Chika Kamezawa¹, Junya Kowa², Wataru Yashiro¹ (1.Tohoku Univ., 2.IHI)

[8a-PA3-8]Spectral linewidths and energetic ion measurement of EUV source using Li planer target

〇Shunya Yamamoto¹, Hayato Yazawa¹, Naoki Nagahama¹, Yuta Takai¹, Takeshi Higashiguchi¹ (1.Utsunomiya Univ.)

[8a-PA3-9]Molecular dynamics study of early stages of development process for chemically amplified resists

〇Kosei Tada¹, Hiroto Wakamatsu¹, Masaaki Yasuda¹ (1.Osaka Met. Univ.)

[8a-PA3-10]Formation of Ultrafine Lamellar Structures and Their Orientation Characteristics in High-χ
Block Copolymers

〇RYOTA ABE¹, YUTA SHIKI¹, MIZUKI KISHIMOTO¹, YUJI MIZOBE¹, SEIYA KIKUCHI¹ (1.Mitsui Chemicals, Inc.)

[8a-PA3-11]Transfer to toluene-added silicone using photoresist molds

〇(M1)Kotaro Daikoku¹, Itsunari Yamada¹ (1.Setsunan Univ.)

[8a-PA3-12]Study on High-Resolution Printing of TTA-UC Photopolymerization via a DLP Light Source

〇Tomohiro Mori¹, Yuhei Nomura¹, Midori Tsujimoto¹, Hitoshi Saomoto¹, Takeshi Mori¹ (1.Industrial Tech. Ctr. of Wakayama Pref.)

[8a-PA3-13]Effect of Noble Gas Mixing on the production of Carbon Molecular Ion Beam

〇(M2)Kozaburo Ito¹, Yuto Imai¹, Toshiro Kasuya¹, Naoki Miyamoto¹, Motoi Wada¹, Harunori Yoshikawa¹ (1.Doshisha Univ.)

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