Presentation Information
[8a-PB1-4]Effect of Anodization Temperature on the Self-Organization of Nanoholes in Anodic Aluminum Oxide (AAO)
〇(M2)Keishiro Matsui1 (1.Kansai Univ.)
Keywords:
anodization
Three-dimensional microstructures are widely used in LSI and MEMS sensors, and further increases in aspect ratio are required to achieve higher performance. In this study, we focus on anodic aluminum oxide (AAO), which can self-organize nanopores with diameters ranging from several tens to several hundreds of nanometers. However, the conditions under which AAO nanopores form regularly ordered arrays are limited. Therefore, we investigate the effect of electrolyte temperature during anodization on the formation of ordered pore arrays and explore new conditions for self-organization.