[8a-PB3-1~5] 13.3 Insulator technology

[8a-PB3-1] Formation of hydrogen molecules originating from Si-H and N-H bonds in SiN_x films

〇Tomoki Oku¹, Kohei Nishiguchi¹, Masahiro Totsuka¹, Yasuyuki Nakagawa¹, Hajime Sasaki¹ (1.Mitsubishi Electric)

Keywords:

molecule formation,Thermal Desorption Spectrometry,Fourier Transform InfraRed spectrometer

We clarified that the low activation energy for hydrogen diffusion (transfer) within a SiN_x film formed at low temperatures is due to the formation of hydrogen molecules.