[8a-S2-1~11] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[8a-S2-4] Non-Volatile and Reversible Resonance Wavelength Tuning in Silicon Nitride Waveguide Ring Resonators

〇Yuriko Maegami¹, Sohei Ogasawara^1,2, Rai Kou¹, Toshihiro Narushima¹, Tai Tsuchizawa¹, Hitoshi Kawashima¹, Noritsugu Yamamoto¹, Madoka Ono², Guangwei Cong¹, Koji Yamada¹ (1.AIST, 2.Tohoku Univ.)

Keywords:

silicon nitride,ring resonator,non-volatile

We demonstrated non-volatile and reversible resonance wavelength tuning in a plasma-enhanced chemical vapor deposition (PECVD)-fabricated silicon nitride (SiN) waveguide ring resonator using refractive-index changes induced by charge-state transitions of dangling bonds.