[8a-S5-1~11] 3.6 Laser processing

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-S5-8] In-situ observation of bifurcation formation in LIPSS on silicon induced
by femtosecond laser irradiation

〇(M1)Seiya Kambara¹, Kohei Chigusa¹, Hiroki Nakako¹, Tatsuya Okada¹, Takuro Tomita¹ (1.Tokushima Univ.)

Keywords:

laser-induced periodic surface structures (LIPSS),femtosecond laser,in-situ observation

In laser-induced periodic surface structures (LIPSS) formed by femtosecond laser irradiation, local groove widening and bifurcation may occur during the formation process depending on the irradiation conditions. Such bifurcation structures are an important issue for the formation of uniform periodic structures. In this study, the formation process of LIPSS on a Si surface was tracked by in-situ SEM observation, and the effects of pulse interval on bifurcation formation and LIPSS ordering were investigated.