Presentation Information
[8a-S5-9]Alloy formation of Fe/Cu/Ni multilayer thin films by ultrashort pulse laser irradiation
〇(M1)Yuma Yonezawa1, Koji Nakagawa1, Keisuke Takabayashi2, Tsubasa Endo2, Makoto Yamaguchi3, Tatsuya Okada1, Yohei Kobayashi2, Takuro Tomita1 (1.Tokushima Univ., 2.ISSP Univ. of Tokyo, 3.Akita Univ.)
Keywords:
ultrashort pulse laser,laser alloying
In this study, the effect of ultrashort-pulse laser irradiation on Fe/Cu/Ni multilayer thin films was investigated with the aim of forming a ternary alloy consisting of Fe, Cu, and Ni. Fe and Cu are known to exhibit strong phase separation and are essentially immiscible with each other. Thin films were deposited on a substrate in the order of Fe, Cu, and Ni, and laser irradiation was applied from the substrate side. After irradiation, the elemental distribution was examined using elemental mapping obtained by energy-dispersive X-ray spectroscopy (EDS) in a transmission electron microscope (TEM). In addition, candidate phases were investigated through the analysis of selected-area electron diffraction (SAED) patterns.