Presentation Information

[8p-B21-2]Technology Trends of GAA/CFET Devices and Activities of LSTC

〇Toshiro Hiramoto1,3, Hitoshi Wakabayashi2,3 (1.The Univ. of Tokyo, 2.Science Tokyo, 3.LSTC)

Keywords:

Advanced Logic Semiconductor,GAA,CFET

Driven by the explosive proliferation of generative AI and expectations for further advancements, the semiconductor industry is experiencing an unprecedented boom. Technical node numbers in advanced logic semiconductors continue to shrink steadily, and device architectures have transitioned from conventional FinFETs to Gate-All-Around (GAA) structures. This presentation will introduce the technological trends in advanced logic semiconductor devices, along with the research and development activities at LSTC.