[8p-B21-1~10] (Public Symposium) Advanced Logic Semiconductors: From Si-GAA to CFET and Beyond

3:05 PM - 3:35 PM JST(6:05 AM - 6:35 AM UTC)

[8p-B21-5] Research on Oxide Semiconductor for Integrated Device Application

〇Masaharu Kobayashi¹, Kuniyuki Kakushima², Takanori Takahashi³, Yuichiro Mitani⁴ (1.IIS, Univ. Tokyo, 2.Science Tokyo, 3.NATI, 4.TCU)

Keywords:

Oxide Semiconductor