[8p-C309-1~16] 12.7 Biomedical Engineering and Biochips

6:00 PM - 6:15 PM JST(9:00 AM - 9:15 AM UTC)

[8p-C309-15] Fabrication of a Cuff-Type Multi-Electrode Using Self-Doped PEDOT

〇Touichiro Goto^1,2, Koji Sakai^1,2, Yosuke Mizuno^1,2, Taiki Otomo^1,2, Aya Tanaka^1,2 (1.NTT BRL, 2.NTT BMC)

Keywords:

PEDOT,Self-folding,Parylene

We investigated the fabrication of cuff-type thin-film electrodes, featuring wet-patterned self-doped PEDOT (S-PEDOT) patterns between two parylene layers, and evaluated their self-folding into three-dimensional shapes. S-PEDOT was successfully patterned with an accuracy on the order of 10 um via wet etching using sodium hypochlorite, without causing damage to the underlying parylene. Furthermore, we achieved three-dimensional shaping through self-folding triggered by the dissolution of a sacrificial layer beneath the thin film.