[8p-N102-1~6] Applications of quantum beams to semiconductor process and evaluation technologies

4:20 PM - 4:50 PM JST(7:20 AM - 7:50 AM UTC)

[8p-N102-6] E-beam metrology and inspection technology for chip manufacturing

〇Yuko Iwabuchi¹ (1.Hitachi High-Tech Corporation)

Keywords:

Semiconductor,Metrology,Inspection