Presentation Information
[8p-PB2-11]Measurement of the Neutralization Coefficient of a Fast Atom Beam Source Using a Faraday Cup
〇FUMA ITO1, TAICHI HINO1, KYOSUKE OSHIMA1, YUKI MIYOSHI1, CHIEMI OKA1, HIROTAKA TOYODA2, SEIICHI HATA1 (1.Nagoya Univ., 2.cLPS, Nagoya Univ.)
Keywords:
Fast Atom Beam,Neutralization Coefficient,Faraday Cup
Surface activated bonding using a fast atom beam (FAB) is expected to be applied to three-dimensional semiconductor integration, and quantitative evaluation of the neutralization efficiency is important for suppressing electrical damage. In this study, an evaluation system for the neutralization efficiency of a novel FAB source is being developed. As a preliminary step, a measurement system employing a Faraday cup and an electrostatic deflector was constructed. Furthermore, the neutralization efficiency of a saddle-field-type FAB source was measured, and the validity of the measurement system was verified by comparison with previous studies.