Presentation Information
[8p-PB2-13]Operational Characteristics of a Fast Atom Beam Source with an Internal Electrode and Their Effects on Irradiation Characteristics
〇Taichi Hino1, Fuma Ito1, Yuki Miyoshi1, Kyosuke Oshima1, Chiemi Oka1, Seiichi Hata1 (1.Nagoya Univ.)
Keywords:
room temperature bonding,surface activated bonding,fast atom beam
Surface activated bonding (SAB) requires fast atom beam (FAB) sources capable of uniform irradiation over large areas. Although a previous study improved irradiation uniformity by introducing an internal electrode, the effects of the electrodes aperture diameter on the operating and irradiation characteristics have remained unclear. This study evaluated these effects. Decreasing the aperture diameter reduced the required Ar flow rate and increased the etching rate. Conversely, increasing the aperture diameter was found to improve irradiation uniformity through a reduction in the mean free path.