Presentation Information

[9a-A33-1]Automatic 2D semiconductor heterostructures fabrication assisted by robotic technology

〇Atsushi Kishida1, Wataru Idehara1, Kenji Watanabe2, Takashi Taniguchi2, Shinichiro Matano1, Kazunari Matsuda1 (1.Kyoto Univ., 2.NIMS)

Keywords:

2D semiconductors