[9a-C213-1~13] 3.8 Terahertz technologies

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9a-C213-5] Fabrication and Characterization of LNOI Doubly Clamped Beam NEMS Resonators for High-Sensitivity Terahertz Detection

〇Tateki Mori¹, Isao Morohashi², Ya Zhang¹ (1.Tokyo Univ. of Agri. & Techno., 2.NICT)

Keywords:

NEMS,THz,LiNbO3

In this presentation, we report the fabrication and thermal response characterization of LNOI doubly clamped NEMS resonators for highly sensitive room-temperature THz bolometers. Lithium niobate is used as the beam material because of its large thermal expansion coefficient and low thermal conductivity, which are advantageous for enhancing the thermal response of resonant bolometers. The resonance frequency shift induced by Joule heating in a NiCr thin film was measured and used to evaluate the thermal responsivity. In addition, the device performance will be discussed in terms of noise-equivalent power and detection speed, and the applicability of LNOI NEMS resonators to sensitive THz detection will be examined.