Presentation Information

[9a-C309-2]Fabrication and characterization of a CMOS odor sensor enabling separate detection of two types of responses in an odor-sensitive membrane

〇Asahi Okada1, Yoshihiro Asada1, Yasuyuki Kimura1, Yoshiko Noda1, Daisuke Akai1, Takeshi Hizawa1, Ik-Hyun Kwon1, Yong-Joon Choi1, Kazuhiro Takahashi1, Kazuaki Sawada1, Toshihiko Noda1 (1.Toyohashi Univ. of Tech.)

Keywords:

Odor sensor,Separate detection,CMOS sensor

To date, our research group has been developing a CMOS potential-detection-type odor sensor in which multiple odor-sensitive films are selectively deposited on a potential sensor array, and we have successfully achieved the discrimination of multiple gases. However, although this sensor is known to exhibit two types of response, it is difficult to detect them separately. Therefore, in this study, we proposed a measurement method capable of separating these responses, and designed and fabricated the sensor. In this presentation, we report on the verification of the proposed method’s principles.