[9a-E215-1~10] 17.1 Growth, Assembly, Structure control

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[9a-E215-6] Uniform SiC Deposition throughout CNT Forests by Thermal CVD Using Vinylsilane

〇(B)Jiajin Wang¹, Naoto Oshima¹, Kenichi Uehara^2,3, Yasuo Nakai⁴, Fukuchi Shinya⁴, Shigeo Yasuhara³, Wakana Takeuchi¹ (1.Aichi Inst. of Tech., 2.Tohoku Univ., 3.Japan Advanced Chemicals Ltd., 4.Koatsu Gas Kogyo Co., Ltd.)

Keywords:

Carbon Nanotube,Silicon Carbide,Chemical Vapor Deposition