Presentation Information

[9a-E301-5]Highly Selective Water Sensing Properties of Membrane-type Surface Stress Sensor using DNA Thin Films Prepared via Laser Molecular Beam Deposition

Xuechen Shen1, Shuai Liu1, Tomohiro Murata1, Kosuke Minami2, Genki Yoshikawa2, Tomohiko Yamazaki2, 〇Nobuyuki Matsuki3, Katsuhiko Ariga2,1 (1.The Univ. of Tokyo, 2.NIMS, 3.Kanagawa Univ.)

Keywords:

DNA,Laser Molecular Beam Deposition,Moisture sensor

Detecting trace water in organic solvents is important for the food, pharmaceutical, and chemical industries. In this study, we applied laser molecular beam deposition (LMBD) to fabricate DNA thin films on a membrane-type surface stress sensor (MSS) and investigated their application to water sensing. The resulting films were thinner and more uniform than inkjet-deposited films, with the response ratio of water vapor to organic solvents reaching 7–22. Furthermore, the limit of detection (LOD) was estimated at 5 × 10-4 %RH based on the experimental results.The response variation among sensing elements was also suppressed to about 10%, greatly improving reproducibility.