Presentation Information
[9a-F211-4]Proposal of Process Informatics Based on Parametric Testing
— Construction of a Quality Knowledge Platform through Integration of Equipment State Variables and Device Characteristics —
〇TAKEKI ANDO1,2 (1.M&M International, 2.ONC Inc)
Keywords:
Parametric Testing,Process Informatics,Quality Knowledge Platform
Semiconductor devices are manufactured by production equipment, and variations in equipment conditions ultimately appear as variations in device characteristics. In this study, E-Test data are regarded not merely as a pass/fail screening tool but as a valuable source of process knowledge. We propose a Quality Knowledge Platform that integrates equipment state variables with device characteristics through comprehensive data analysis. The potential of process informatics based on parametric testing for quality improvement and yield enhancement is discussed.