[9a-F211-1~12] 18.2 Process Informatics

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[9a-F211-8] Interpretable self driving sputtering: extracting growth rules from black-box optimization

〇Yuuki Wakabayashi¹, Yui Ogawa¹, Franz Benedict Romero¹, Coleman Wagner¹, Takuma Otsuka², Yoshitaka Taniyasu¹ (1.NTT BRL, 2.NTT CS Lab.)

Keywords:

self driving sputtering,Ga2O3,Interpretation