[9a-N102-1~12] 6.1 Ferroelectric thin films

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[9a-N102-7] AlN polarization inverted 10-layer resonator controlled by sputtering gas ratio

〇Nanami Suzuki^1,2, Daisuke Taniguchi^1,2, Ayaka Hanai^1,2, Takahiko Yanagitani^1,2 (1.Waseda Univ., 2.ZAIKEN)

Keywords:

AlN,P3F,Polarization inversion