Presentation Information
[9a-PA2-4]Understanding the Charge Amount of Spray Droplets during Two-Fluid Spray Cleaning Using IPA
〇kota sugiura1, Sato Jundai1, Mori Tatsuo1, Ichino yusuke1, Seike Yushiyuki1 (1.Aichi Inst. of Technol)
Keywords:
semiconductor,cleaning,spray
Two-fluid spray cleaning is effective for removing fine particles; however, the charging of spray droplets may cause electrostatic problems. Since the droplet charging behavior during two-fluid spray cleaning using IPA is not yet fully understood, this study compared the droplet current of pure water and IPA sprays using a Faraday cage.