Presentation Information
[9a-PA7-7]Nanostructure Fabrication Technology Using PS-PDMS Block Copolymer
〇(M1)Takuro Obe1, Yuki Hirota1, Fangzhu Meng1, Shuo Li1, You Yin1 (1.Gunma Univ.)
Keywords:
Nanostructure Fabrication
This presentation will discuss microstructure formation using self-assembly of PS-PDMS block copolymers. The phase separation mechanism and principles of microstructure formation will be explained, and the effects of molecular weight and process conditions on the resulting structures will be introduced. Potential applications in semiconductor and nanodevice fabrication will also be discussed.