Presentation Information
[9a-PB1-12]Modal Analysis of a Length-Extension Resonator (LER) Sensor
〇Mihiro Imakita1, Hirofumi Yamada2, Yuji Miyato1 (1.Ryukoku Univ, 2.Joint Res. Cent. of Sci. and Tech., Ryukoku Univ.)
Keywords:
AFM,LER,Vibration Analysis
With the aim of applying a Length-Extension Resonator (LER) quartz crystal sensor with a resonance frequency of approximately 1 MHz, which is also used in atomic force microscopy (AFM), to liquid viscosity evaluation, we investigated changes in its vibration characteristics caused by mass loading. First, the effects of mass loading on the vibration characteristics were investigated using finite element method (FEM) modal analysis, and the resonance frequency and Q-factor were evaluated. Furthermore, force–curve measurements were performed at the air–liquid interface to examine the applicability of the sensor to local physical property evaluation.