[9p-A33-1~16] 17.3 Applications

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[9p-A33-1] [The 60th Young Scientist Presentation Award Speech] Integrated multi-AI agent and robot system for fabrication and analysis of 2D semiconductors

〇Wataru Idehara¹, Kohei Aso², Yukiko Takamura-Yamada², Yoshifumi Oshima², Kenji Watanabe³, Takashi Taniguchi³, Shinichiro Matano¹, Kazunari Matsuda¹ (1.Kyoto Univ., 2.JAIST, 3.NIMS)

Keywords:

2D semiconductor