[9p-E101-1~7] (Public Symposium) Advanced semiconductor industry starting up in Hokkaido

3:05 PM - 3:35 PM JST(6:05 AM - 6:35 AM UTC)

[9p-E101-5] The Evolution of EUV Lithography: From Low-NA Manufacturing to High-NA Innovation and Beyond

〇Seiji Nagahara¹ (1. ASML Japan)

Keywords:

EUV,Lithography,ASML

In recent years, EUV lithography equipment has become a fundamental and crucial piece of system and technology in the manufacturing of advanced semiconductor chips. This presentation will describe the current status and future roadmap of NA0.33 EUV lithography system used in high volume production fabs around the world.