[9p-E308-1~15] 8.1 Plasma production and diagnostics

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[9p-E308-13] Three-dimensional Reconstruction of Ar Plasma Emission by Wavelength-selective Multi-view Emission Tomography with an Interference Filter

〇Hayato Yoshikawa¹, Hirotaka Toyoda², Haruka Suzuki^1,2 (1.Nagoya Univ., 2.cLPS, Nagoya Univ.)

Keywords:

Plasma,Reconstruction,CCP

In recent years, as plasma processes have become increasingly sophisticated, the importance of diagnostic techniques capable of non-invasively characterizing plasma spatial structures has grown. In this study, a spectroscopic imaging system incorporating an interference filter was developed to introduce wavelength selectivity into multi-view optical emission tomography. Emission images in the 750 nm band were acquired from multiple viewing angles in an Ar capacitively coupled plasma, and the three-dimensional emission distribution was reconstructed using Tikhonov–Phillips regularization. The results confirmed that wavelength-selected emission distributions can be reconstructed three-dimensionally using the proposed method.