[9p-N102-1~10] Frontiers in Advanced Laser Processing: Tracing 40 Years of Evolution and Future Prospects from Its Origins

1:35 PM - 2:35 PM JST(4:35 AM - 5:35 AM UTC)

[9p-N102-2] The 40-Year Journey of Laser Microprocessing: Technological Innovations and Future Challenges

〇Koji Sugioka¹ (1.RIKEN RAP)

Keywords:

laser microprocessing,40-year journey,future perspective

The demonstration of excimer laser lithography and the discovery of polymer ablation by excimer lasers in 1982 marked the beginning of a new era in laser microprocessing. The subsequent report of femtosecond laser ablation in 1987 opened the door to ultrashort-pulse laser processing. Over the past four decades, laser microprocessing has evolved into an indispensable manufacturing technology. This talk reviews the major milestones in its development and offers perspectives on future directions.