[9p-PB3-1~11] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[9p-PB3-10] Validity evaluation of the deep-learning-based RHEED pattern classification during the quantum dot growth

〇Kei Bito¹, Nobuhiko Ozaki¹ (1.Wakayama Univ.)

Keywords:

Reflection High Energy Electron Diffraction,Machine Learning