The 87th JSAP Autumn Meeting 2026
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7 Beam Technology and Nanofabrication : 7.3 Micro/Nano patterning and fabrication

Oral presentation

[9p-E208-1~11]7.3 Micro/Nano patterning and fabrication

Wed. Sep 9, 2026 1:30 PM - 4:30 PM JST
Wed. Sep 9, 2026 4:30 AM - 7:30 AM UTC
E208 (First Year Education Bld. E Block)
Chair : Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)
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