The 73rd JSAP Spring Meeting 2026
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Thin-Film

[4-1] ULVAC TECHNO, Ltd

ULVAC TECHNO, Ltd

 

Address253-8555
神奈川県茅ヶ崎市萩園2609-5
TEL0467-87-1041
Web site, SNS https://www.ulvac-techno.co.jp/
[2-3] HTL Co. Japan Ltd.

HTL Co. Japan Ltd.

 

Address190-0012
東京都立川市曙町2-16-6　テクノビル3階
TEL042-523-2871
Web site, SNS https://www.htlco.co.jp/
[1-5] ALD Japan, Inc.

ALD Japan, Inc.

Anric Technologies & Bench top Atomic Layer Deposition (ALD) systems (Thermal & Plasma types, Particle coating option)

Address183-0056
東京都府中市寿町1-3-10-401
TEL042-360-3152
Web site, SNS https://aldjapan.com/
[1-9] Echo Tech Co., Ltd./ HONDA ELECTRONICS CO., LTD.

Echo Tech Co., Ltd./ HONDA ELECTRONICS CO., LTD.

Ultrasonic Atomizing Unit, Ultrasonic Cutter, Othe Ultrasonic Applied Equipment

Address441-3131
愛知県豊橋市大岩町小山塚20
TEL0532-65-5158
FAX0532-65-5159
Web site, SNS https://echotech.co.jp/
[1-4] SDI Company Ltd.

SDI Company Ltd.

 

Address600-8815
京都府京都市下京区中堂寺粟田町93　京都リサーチパーク6号館 417号
TEL075-323-0236
FAX075-323-0237
Web site, SNS https://www.sdicompany.com/
[2-10] NPa SYSTEM CO., LTD.

NPa SYSTEM CO., LTD.

 

Address335-0001
埼玉県蕨市北町5-11-20
TEL048-446-9614
FAX048-446-9620
Web site, SNS https://www.npasystem.co.jp/
[1-2] EpiQuest, Inc.

EpiQuest, Inc.

 

Address601-8142
京都府京都市南区上鳥羽中河原町78
TEL075-693-3356
FAX075-693-3356
Web site, SNS https://www.epiquest.co.jp
[2-14] ELIONIX INC.

ELIONIX INC.

Electron Beam Lithoraphy system [ELS series], ECR Ion Beam system [EIS series], Nanoindentation tester [ENT series]

Address193-0063
東京都八王子市元横山町3-7-6
TEL042-626-0611
Web site, SNS https://www.elionix.co.jp/
[2-1] Kenix Corporation

Kenix Corporation

 

Address670-0935
兵庫県姫路市北条口2-15-501
TEL079-283-3150
FAX079-280-3002
Web site, SNS http://www.kenix.jp/
[1-7] Samco Inc.

Samco Inc.

Samco Inc. will present equipment and process solutions focused on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) technologies. Samco’s ALD systems utilize self-limiting surface reactions to achieve atomic-scale thickness control, excellent conformality on high-aspect-ratio structures, and compatibility with low-temperature processes. The systems offer flexible process design suitable for applications ranging from research and development to pre-production evaluation. Samco’s ALE solutions employ cyclic, self-limiting adsorption and removal processes to enable atomic-layer-level material removal. This approach provides precise dimensional control, low plasma-induced damage, and high etching selectivity, addressing the requirements of advanced semiconductor, power device, and MEMS applications.

Address612-8443
京都府京都市伏見区竹田藁屋町36
TEL075-621-7841
Web site, SNS https://www.samco.co.jp/
[2-5] AIST Nano-Processing Facility

AIST Nano-Processing Facility

 

Address305-8568
茨城県つくば市梅園1-1-1　つくば中央事業所2群
Web site, SNS https://www.tia-kyoyo.jp/page/dir000004.html
[2-13] SANYU ELECTRON CO., LTD

SANYU ELECTRON CO., LTD

DESK TOP RF SPUTTER SVC-700RFIII, MULTI TARGETS COMPACT COATER SVC-700TMSG/ Adexcel

Address169-0073
東京都新宿区百人町1-22-6
TEL03-3363-3551
FAX03-3364-2892
Web site, SNS https://www.sanyu-electron.co.jp/
[2-6] GEOMATEC Co., Ltd.

GEOMATEC Co., Ltd.

 

Address146-0093
東京都大田区矢口3-13-7
TEL03-3759-9325
Web site, SNS https://www.geomatec.co.jp/
[2-4] SHINKOSHA CO., LTD.

SHINKOSHA CO., LTD.

Oxide single crystal substrates and more

Address247-0007
神奈川県横浜市栄区小菅ケ谷2-4-1
TEL045-892-4739
FAX045-892-2986
Web site, SNS https://www.shinkosha.com/
[2-11] SUGA Co., Ltd.

SUGA Co., Ltd.

Best solution of thin films [SAL1000 Desktop ALD Equipment]. It's small and easy installation.

Address049-0101
北海道北斗市追分3-2-2
TEL050-3734-0730
FAX0138-49-8661
Web site, SNS https://agus.co.jp/
[7-1] SPLEAD Corporation

SPLEAD Corporation

 

Address206-0801
東京都稲城市大丸422-1
TEL042-379-4655
FAX042-379-4656
Web site, SNS https://www.splead.jp/
[7-8] TNS Systems LLC

TNS Systems LLC

Portable & Attachable Raman Senser, Raman Microscope System, YAG Laser Micro Processing System, Probing solution for Semiconductor Test, High Current Connector, Custom-made equipment

Address271-0077
千葉県松戸市根本14-2-707
TEL047-703-1500
Web site, SNS http://tns-systems.jp/
[7-8] TPT Japan Co., Ltd.

TPT Japan Co., Ltd.

Wire Bonder machine, Plasma Cleaner

Address224-0003
神奈川県横浜市都筑区中川中央2-5-13-402
TEL045-590-3838
Web site, SNS http://www.tpt-japan.com/
[3-16] TEGA Science, Inc.

TEGA Science, Inc.

 

Address277-0832
千葉県柏市北柏3-5-4
TEL047-168-5311
Web site, SNS https://www.tegascience.co.jp/
[1-6] Techno Print Co., Ltd.

Techno Print Co., Ltd.

Pre-coated glass, Pattern glass, Plating, pattern

Address356-0054
埼玉県ふじみ野市大井武蔵野1396-3
TEL049-263-3487
FAX049-262-4882
Web site, SNS https://technoprint.co.jp/
[2-8] NIHON HOHDEN GIJYUTSU CO., LTD.

NIHON HOHDEN GIJYUTSU CO., LTD.

 

Address578-0967
大阪府東大阪市新鴻池町12-2
TEL072-965-8781
FAX072-965-8674
Web site, SNS https://www.nhg-jem.co.jp/
[1-1] HiSOL, Inc.

HiSOL, Inc.

 

Address110-0005
東京都台東区上野1-17-6
TEL03-3836-2800
FAX03-3836-2266
Web site, SNS https://www.hisol.jp/
[1-3] Hightec Systems Corporation

Hightec Systems Corporation

 

Address220-0011
神奈川県横浜市西区高島1-1-2　三井横浜ビルディング19階
TEL045-306-9780
Web site, SNS https://www.hightec-sys.com/
[7-8] Priways Co., Ltd.

Priways Co., Ltd.

High-resolution Printing machine, Table-size coater

Address305-0044
茨城県つくば市並木1-1　物質・材料研究機構
TEL029-860-4918
Web site, SNS http://priways.co.jp/
[1-8] Beneq KK

Beneq KK

Beneq TFS?200/500 is an ALD system widely adopted worldwide for academic research and corporate R&D. It delivers fast and highly precise pure ALD deposition, enabling coatings on high-aspect-ratio structures and a variety of substrates. Its dual-chamber hot-wall design ensures uniform heating, while cross-flow provides uniform gas distribution. The system also supports a PEALD option and offers a wide range of upgrades to meet the most demanding research requirements.

Address222-0033
神奈川県横浜市西区みなとみらい4-4-2　横浜ブルーアベニュー12階
TEL045-274-5273
Web site, SNS https://beneq.com/
[2-9] MICROJET Corporation

MICROJET Corporation

 

Address399-0732
長野県塩尻市大門五番町79-2
TEL0263-51-1734
Web site, SNS https://www.microjet.co.jp/