Presentation Information
[16p-M_103-8]Actuation Property Evaluation of the 3-D PEDOT:PSS Structure Directly Fabricated by Electron Beam Lithography
〇(D)Yandong Yang1, Shin'ichi Warisawa1, Reo Kometani1 (1.Tokyo Univ.)
Keywords:
PEDOT:PSS,electron beam lithography,actuators
In this work, the PEDOT:PSS 3-D suspended structures were directly fabricated by electron beam lithography, the influence of electron beam exposure on their actuation behavior was evaluated. The suspended PEDOT:PSS structure exhibited reversible actuation, its midline width decreased from 7.1 μm to 6.7 μm at 1 mA and returned to the initial state after the current was removed. The dependence of contraction ratio on current density exhibits three distinct regimes, independent of the exposure dose. The contraction ratio initially increases rapidly with current density, transitions into a gradual plateau, and finally rises steeply again. Besides, it is found that the structures fabricated at lower doses enable higher current densities and exhibit larger maximum contraction ratios. Additionally, actuation characteristics saturate at exposure of 280 μC/cm2, and structures with higher exposure doses exhibit larger contraction ratios at a given current density, which will benefit the low-power actuation.