[16p-PB1-1~18] 6.2 Carbon-based thin films

[16p-PB1-2] Investigation of Machine Learning Efficiency Enhancement through DCT-Based Analysis of Spectroscopic Data during DLC Deposition

〇Naoki Kashimura¹, Akira Nakamura¹, Takashi Komatsu¹, Yoshiharu Ohgoe² (1.Kanagawa Univ., 2.Tokyo Denki Univ.)

Keywords:

spectral,Diamond Like Carbon,plasma