Presentation Information

[17a-M_178-9]Integrated AI agent and robot system for fabrication of high quality 2D semiconductors

〇Wataru Idehara1, Yukiko Takamura2, Yoshifumi Oshima2, Kohei Aso2, Kenji Watanabe3, Takashi Taniguchi3, Shinichiro Matano1, Kazunari Matsuda1 (1.Kyoto Univ., 2.JAIST., 3.NIMS.)

Keywords:

2D semiconductor