Presentation Information
[17p-W9_325-9]Effect of ICeO film thickness reduction on electrical and optical properties
〇Masahiro Okada1, Terunobu Ando1, Genki Sugiura1, Palanisamy Baskaran1, Lee Hyunju2, Yoshio Oshita1 (1.Toyota Tech. Inst., 2.Meiji Renewable Energy Lab)
Keywords:
TCO
