[18p-S4_201-1~11] 3.6 Laser processing

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)English Presentation

[18p-S4_201-9] Numerical Simulation of Two-Photon Polymerization via GHz Burst-Mode Femtosecond Laser Pulses

〇(PC)Ashkan MomeniBidzard¹, Koji Sugioka¹ (1.RIKEN, RAP)

Keywords:

Femtosecond Laser Processing,GHz burst,Two-photon polymerization

In this study, we numerically investigate the underlying mechanism for improving fabrication resolution in two-photon polymerization (TPP) of SU-8 photoresist using GHz burst-mode laser irradiation. Analysis of transient thermal response under 1000-pulse irradiation in both single-pulse and GHz burst modes confirms that heat accumulation is a key factor in the improved fabrication resolution of GHz burst-mode TPP.