Physical Properties

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[2-47A] Preparation of Y-Ca-Cr-Mn oxide thin films by sputtering method and their thermistor properties 《 Physical, Property 》

*Takuro Shichi¹, Kenji Kamisima¹, Koichi Kakizaki¹ (1. Saitama University)

Keywords:

thin film,thermistor,Temperature Sensor,Sputtering