Presentation Information
[1-48A]Physical vapor deposition-based thin film fabrication for various chalcogenide materials 《 Synthesis Process, Physical Property 》
*Mihyeon Kim1, Kanata Sasaki1, Daiki Inose1, Hayato Suzuki1, Haruto Kouo1, Yuta Saito1 (1. Tohoku Univ.)
Keywords:
chalcogenide thin film,physical vapor deposition method,thermal evaportion,sputtering method