LPM 10: Laser-based Direct-write Techniques

3:20 PM - 3:40 PM JST(6:20 AM - 6:40 AM UTC)

[13-05] Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of sio_x films on fused silica

*Nastaran Bakhtiari¹ (1. Institut für Nanophotonik Göttingen e.V.,37077 Göttingen, Germany (Germany))

Keywords:

Silicon suboxide,Fused silica,Excimer laser,Micro/nanochannels,Micro/nanofluidics

C000290