Presentation Information
[14-02]Fabrication of High-Aspect-Ratio Through-Glass-Vias Using Ultrafast Laser
*Natalia Grudzień1, Bogusz Stępak1, Rafał Smolin1, Yuriy Stepanenko1, Michał Nejbauer1 (1. Fluence sp. z o.o. (Poland))
Keywords:
femtosecond laser,glass drilling,TGV
C000300