Presentation Information

[21-03]Process Optimization with Flexible Pulse Bursts using Bayesian Optimization

*Benedikt Bornschlegel1, Moritz Kröger1, Dennis Haasler2, Christian Hinke1 (1. Lehrstuhl für Lasertechnik - RWTH Aachen University (Germany), 2. Fraunhofer-Institut für Lasertechnik ILT (Germany))

Keywords:

AI,Bayesian Optimization,USP,Bursts,Ablation

C000302