Presentation Information

[25-04]Pulse accumulation effect of femtosecond laser irradiation on laser-induced periodic surface structures of Si and SiC

*Kohei Chigusa1, Tatsuya Okada1, Takuro Tomita1 (1. Tokushima University (Japan))

Keywords:

LIPSS(Laser-induced periodic surface structures),SEM,Groove width

C000066