Presentation Information
[P-12]Ultrashort pulsed laser drilling of through-glass vias for glass core packaging
*Daniel Franz1, David Schuster1, Simon Schwarz1, Stefan Rung2, Cemal Esen3, Ralf Hellmann1 (1. University of Applied Sciences Aschaffenburg (Germany), 2. Schmoll Maschinen GmbH (Germany), 3. Ruhr University Bochum (Germany))
Keywords:
Ultra-short pulsed laser,Laser drilling,Through-glass vias (TGV),Borofloat 33 glass
C000031