Poster Session 1

[P-33] High-accuracy and high-efficiency phase plate machining with the high-speed femtosecond laser photolithography system

*Zhaoxiang Liu¹, Guanhua Wang¹, Mengyue He¹, Jia Qi¹, Jinming Chen¹, Ya Cheng^1,2 (1. East China Normal University (China), 2. Shanghai Institute of Optics and Fine Mechanics (China))

Keywords:

femtosecond laser micromachining,Fresnel phase plate,diffractive optical elements,photolithography

C000053